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MEMS design and development
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
1998
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| Subjects: |
| LEADER | 00435nab a22001577a 4500 | ||
|---|---|---|---|
| 008 | 160615b1998 xxu||||| |||| 00| 0 eng d | ||
| 100 | |a Ramaraju, G. V. | ||
| 245 | |a MEMS design and development |c Ramaraju, G. V. | ||
| 260 | |c 1998 | ||
| 300 | |a pp.184-194 | ||
| 650 | |a Multifunctional Micro System | ||
| 650 | |a Technet Program | ||
| 650 | |a Cad Tool | ||
| 650 | |a Vlsi Design | ||
| 773 | |a ELECTRONICS INFORMATION & PLANNING |d JAN | ||
| 999 | |c 25346 |d 25346 | ||