Electron beam probing of integrated circuits- a review

Bibliographic Details
Main Author:	Ramrju, G. V.
Format:	Article
Language:	English
Published:	1998
Subjects:	Automation Voltage Measurement Electron Optics Integrated Circuits Electron Testing Electron Beam Probing Vlsi Design


LEADER	00555nab a22001937a 4500
008	160615b1998 xxu\|\|\|\|\| \|\|\|\| 00\| 0 eng d
100		\|a Ramrju, G. V.
245		\|a Electron beam probing of integrated circuits- a review \|c Ramrju, G. V.
260		\|c 1998
300		\|a 229-254
650		\|a Automation
650		\|a Voltage Measurement
650		\|a Electron Optics
650		\|a Integrated Circuits
650		\|a Electron Testing
650		\|a Electron Beam Probing
650		\|a Vlsi Design
773		\|a ELECTRONICS INFORMATION & PLANNING \|d FEB
999		\|c 25348 \|d 25348

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