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Potentialities and economic challenges in the area of MEMS
| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
2006
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| Subjects: |
| LEADER | 00545nab a22001937a 4500 | ||
|---|---|---|---|
| 008 | 160615b2006 xxu||||| |||| 00| 0 eng d | ||
| 100 | |a Kumar, Vikram | ||
| 245 | |a Potentialities and economic challenges in the area of MEMS |c Kumar, Vikram. | ||
| 260 | |c 2006 | ||
| 300 | |a 159-1 | ||
| 650 | |a Nano Electro Mechanical System | ||
| 650 | |a Nems | ||
| 650 | |a Micromachining | ||
| 650 | |a Microelectronics | ||
| 650 | |a Silicon Technology | ||
| 650 | |a Bio Mems | ||
| 650 | |a Mems | ||
| 773 | |a Electronics Information & Planning |d Apr-May | ||
| 999 | |c 34547 |d 34547 | ||